ZPRAVODAJ C VS 10 (3-4), 2001 PRAGOVAC Nekolik zajımavostıze sortimentu firmy LEYBOLD 9

ZPRAVODAJ C VS 10 (3-4), 2001

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Obsah PRAGOVAC 2001

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The Influence of Backing Turbomolecular Pumps on the Hydrogen Partial Pressure in High Vacuum Systems (Dr. Rudolf. Lachenmann)

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Nekolik zajı mavostıze sortimentu firmy LEYBOLD

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Novinky roku 2001 firmy Pfeiffer Vacuum (R. Salomonovic , Z. Hulek)

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Predstavujeme firmy

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Ferrotec GmbH

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TESCAN, s.r.o.

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Moz nosti kalibracımeridel vakua v C R

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C SN tykajı cıse vakuová techniky

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Vakuova technika v povalec nych letech II. (vzpomı na Libor Paty)

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Kalrezš (Pavel Drasar)

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VaQum - 1.International Trade Fair for Vacuum Technology and Vacuum Applications in Magdeburg

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Informace o C VS najdete na adrese http://mbox.troja.mff.cuni.cz/~CVS

Zpravodaj C eská vakuová spolec nosti, c tvrtletnı k, ktery pro svá c leny, k dokumentac nı ma propagac nı m –c elum vydava C eska vakuova spolec nost v Praze (Sekretariat C VS, c/o Sdruz enıMFF UK „ Vakuum Praha, V Holesovic kach 2. 180 00 Praha 8, telefon (02) 21912636, telefax (02) 21912620. E-mail [email protected], IC O 61381811), ISSN 1213-2705, Evidovan jako periodikum u MK C R pod evidenc nı m cı slem MK C R E 11156


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PRAGOVAC 2001 Za, v historii techto seminaru a setkanıvyrobcu a uz ivatelu vakuová techniky rekordnı –c asti 17 firem z tuzemska i ze zahranic ıprobehl dne 14. 11. 2001 jubilejnıdesaty PRAGOVAC. V predvec er vlastnıvystavy a seminare byla usporadana slavnostnıvec ere za –c asti zastupcu z–c astnenych firem a zastupcu Nemecká vakuová spolec nosti a Slovenská vakuová spolec nosti. Jako jiz tradic ne prinası me ve Zpravodaji ty prı spevky prednesená na seminari, která nam autori poskytli ke zverejnenı .

The Influence of Backing Turbomolecular Pumps on the Hydrogen Partial Pressure in High Vacuum Systems Dr. Rudolf. Lachenmann, VACUUBRAND GMBH + CO KG; 97877 Wertheim, Germany

Introduction For many years, turbomolecular pumps are being successfully used for the generation of high and ultra-high vacuum. They are easy to use and show a high degree of operating reliability. The generated high vacuum is considered “ clean° or free of hydrocarbon contamination. Backstreaming of lubricant vapors is drastically reduced by the extremely high compression ratio of the turbomolecular pump for heavy molecules. Therefore, only during standstill can oil and other lubricant vapors from the backing pump, mostly oil-sealed rotary vane pumps, migrate back into the process chamber. Recent developments of turbomolecular pumps with discharge pressures up to 30 mbar allow the use of small, oil-free diaphragm pumps as backing pumps. If these so called “ wide-range° turbomolecular pumps are magnetically levitated, this combination offers a completely oil-free high vacuum. Any hydrocarbon contamination is eliminated even at standstill. Another important aspect of the residual gas composition of UHV/HV systems is the occurrence of light gases, i.e. H2, He and H2O. Turbomolecular pumps have the lowest compression ratios for gases with low molecular weight. Especially, if hydrogen is used as a process gas, the ultimate vacuum is limited by hydrogen due to the compression ratio of the turbomolecular pump. Also, the question is how the residual gas composition, particularly the hydrogen partial pressure, depends on the fore-line pressure and type of backing pump.

Experimental Setup The experimental setup consists of a 500 liter vacuum chamber, various vacuum pumps, vacuum gauges and a residual gas analyser (Fig. 1). The vacuum chamber is evacuated by a 300 l/s wide-range turbomolecular pump. For the experiments, different backing pumps have been connected to the outlet of the turbomolecular pump. A manifold with several valves allows the exchange of backing pumps without venting. The pressures in the high vacuum chamber and in the fore-line were measured with capacitance vacuum gauges. The partial


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pressure of each gaseous component in the system was determined by a quadrupole mass spectrometer. The mass filter ranges from 1 to 100 amu with a listed sensitivity of 2 x 10-4 Amps/torr. In this investigation, only relative mass variations are of interest. Therefore, no correction factors were applied for the different ionization probabilities. The instrument was interfaced with a desktop computer. Hydrogen (99.9 % pure) was supplied to the vacuum chamber through a regulating valve.

Fig. 1: Experimental setup. Fig. 2 shows the compression ratio of the used wide-range turbomolecular pump for nitrogen, helium and hydrogen as a function of the backing pressure (taken from the manufactures data sheet). The details depend on the design, size and so on of the actual pump. In applications, where a low helium or hydrogen background and/or good high vacuum is required, it is important to achieve the lowest possible backing pressure. The ultimate vacuum, which is achievable in the vacuum chamber at zero gas flow, is given by the backing pressure divided by the compression ratio. Therefore, assuming a constant compression ratio, the high vacuum improves with decreasing backing pressure. Additionally, a lower backing pressure will lead to an increase of the compression ratio. For example, in Fig. 2 the compression ratio for hydrogen is about 1000 versus 500 000 at a backing pressure of 0.8 mbar or 0.2 mbar, respectively. Hence, the compression ratio for hydrogen is improved by a factor of 500 if the backing pressure is lowered from 0.8 mbar to 0.2 mbar. This results in a reduction of the hydrogen background, which is in many cases the dominant fraction in the residual gas by nearly three orders of magnitude. Also the ultimate vacuum is lowered correspondingly.


1012

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N2

1011

compression ratio

1010 109 108

He

107 106 H2

105 104 103 -4 10

10-3

10-2

10-1

100

101

backing pressure (mbar)

Fig. 2: Generalized, typical compression ratio of the used wide-range turbomolecular pump. In many cases a high pumping speed of the backing pump is only required during evacuation and high gas throughput cycles. Under high vacuum conditions the gas throughput is extremely low and the pumping speed of the backing pump could be reduced accordingly. Additionally, the backing pressure should be constant to avoid variations in the high vacuum. This can be achieved with variable speed, i.e. rpm-controlled diaphragm pumps. The variable speed motor allows rotational speeds between 0 % and 200 % of the nominal speed. An integrated vacuum-controller measures and keeps the pressure in the fore-line constant by adjusting the pumping speed of the variable speed diaphragm pump. During the pump down cycle, the pumping speed is increased to its maximum value. At high vacuum operation, the pumping speed is reduced accordingly. This not only results in a multiplication of the lifetime of the diaphragms and valves but also in a very significant process and performance advantage. Due to gas flow characteristics and the dynamics of the valves for pressures below 1 mbar, the ultimate vacuum of the diaphragm pump is rpm dependent (see Fig. 3). It is therefore possible to investigate the influence of the backing pressure with one single pump without changing the experimental conditions only by varying the pump rpms.


Ultimate Pressure (relative change)

2.0

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variable speed diaphragm pump

1.8 1.6 1.4 1.2 1.0 0.8 0.6 0.4 0.2

60 Hz

0.0 Rotational Frequency (Hz)

Fig. 3: Variation of ultimate pressure with rotational frequency of a low ultimate vacuum diaphragm pump.

Results Prior to the experiments, the vacuum chamber was evacuated and heated up to 80 ”C over night. The residual gas spectrum after this treatment is shown in Fig. 4. The total pressure is 3.6 x 10-7 mbar. The main component of the residual gas is water.

pressure (x 10-6 mbar)

10-1

10-2

10-3

10-4 mass (amu)

Fig. 4: Typical residual gas spectrum of 500 l vacuum chamber. The 500 liter vacuum chamber, filled with 20 mbar hydrogen was evacuated by a turbomolecular pump backed by a 4 stage diaphragm pump at a constant rpm of 50 Hz. After the wide-range turbomolecular pump reached its operating speed the mass spectrometer was turned on and data were recorded (see Fig. 5). The rpm-controlled diaphragm pump was first run in constant rpm mode, then in “ Turbo-Mode°. The “ Turbo-Mode° maintains a preselected vacuum level (choosable between 1 and 10 mbar) or adjusts automatically the rpm to reach the lowest ultimate pressure (0.2 mbar) if the set value °loň is selected. In this experiment, the


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diaphragm pump was set into Turbo-Mode after 40 minutes and the pressure was regulated to 3, 2, 1 mbar and to the lowest pressure (0.2 mbar) after of 30, 15 and 15 minutes, respectively (see Fig 5b). The partial pressures of all heavier masses continuously decrease with time. Only molecular hydrogen (mass 2) shows a clear dependence on the backing pressure. The hydrogen partial pressure seems to be limited by the compression ratio of the turbomolecular pump.

3 mbar

3 mbar

10-6

2 mbar


m = 18 water m = 2 hydrogen

pressure (mbar)

2 mbar

1 mbar

-7

10

m = 28 nitrogen

10-8

10

1 mbar

0

lo 10-1

continuous operation at 50 Hz

lo

"Turbo-Mode"

m = 32 oxygen

10-2

-9

10

0

20 40 60 80 100 120 140 160 180 200 time (min)

a) b)

0

20 40 60 80 100 120 140 160 180 200 time (min)

Fig. 5: a) Time profile of residual gas components in a 500 l vacuum chamber after the evacuation of 20 mbar hydrogen with 300 l/s wide-range turbomolecular pump and four-stage diaphragm pump. b) Time profile of fore-line pressure in dependence of operational characteristics of the backing pump. Often it is argued that the hydrogen partial pressure is limited by the diaphragm pump. It is assumed that the diaphragms may adsorb hydrogen in large amounts and desorp it later on. In order to see if this effect can be observed, a second diaphragm pump, which has not been exposed to hydrogen was hooked up to the manifold. In Fig. 6 the time profile of hydrogen and water molecules are recorded while the diaphragm pump was switched from the first to the second. The second diaphragm pump was connected to the turbomolecular pump in the period between 50 and 90 minutes. The hydrogen partial pressure shows no change and particularly no improvement. Hence, an assumed outgassing of diaphragms does not seem to be the limiting factor for the hydrogen partial pressure.

10-6

pressure (mbar)

m = 18 water

-7

10

1st pump

2nd pump

1st pump

10-8

m = 28 nitrogen m = 2 hydrogen m = 32 oxygen

10-9 0

20

40

60

80

time (min)

100

120

140

Fig. 6: Time profile of residual gas components in a 500 l vacuum chamber. After 50 minutes a second diaphragm pump was used as a backing pump.


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Another interesting question is: Can the ultimate vacuum of the turbomolecular pumpe be improved by backing pumps with a lower ultimate vacuum? Fig. 7 shows the time profile of the residual gas in the 500 l vacuum chamber after the evacuation of 20 mbar hydrogen. The backing pressure was varied with the rpm-controlled diaphragm pump. In addition, at 130 min a Roots pump was connected into the backing line between turbomolecular pump and diaphragm pump, resulting in an ultimate pressure of 10-2 mbar. In spite, the backing pressure thus was improved by a factor of 50 to 10-2 mbar, there is no visible improvement in the observed gases. Hence, a lower backing pressure below 0.2 mbar does not improve the ultimate vacuum anymore in the high vacuum range. 3 mbar 3 mbar

3 mbar

10-6 m = 18 water

m = 2 hydrogen

10-7

10

m = 28 nitrogen

-8


partial pressure (mbar)

10-5 RP 15 (Roots pump and MV 2)

100

10-1

lo

continuous 10-2 operation MV2 Vario at 50 Hz

lo

"Turbo-Mode" MV 2 Vario at 3 mbar and lo

m = 32 oxygen

10-9

0

20 40 60 80 100 120 140 160 180 200 220 time (min)

10-3

0

lo

"Turbo-Mode" MV 2 Vario at 3 mbar and lo

20 40 60 80 100 120 140 160 180 200 220 time (min)

Fig. 7: a) Time profile of residual gas components in a 500 l vacuum chamber. b) Time profile of fore-line pressure in dependence of operational characteristics of the backing pumps. If the backing pressure is further reduced through the use of an oil-sealed rotary vane pump, the residual gas also shows no further improvement. This can be seen in Fig. 8 where the diaphragm pump was replaced by an oil-sealed rotary vane pump. This is probably due to the fact, that no real well backed UHV-system is used. Data from turbomolecular pumps manufacturers, show that in true UHV applications with diaphragm pumps an ultimate vacuum of 10-8 mbar and with rotary vane pumps an ultimate vacuum of 10-10 mbar can be achieved. In all these cases where the high vacuum could not be improved by lowering the backing pressure, it is apparent, that the partial pressures are limited by the ratio of system outgassing to the pumping speed of the turbomolecular pump. The diaphragm pump - if it has a low enough ultimate vacuum - is not the limiting factor. The use of a Roots or a rotary vane pump with lower backing pressure has no effect on the hydrogen partial pressure in comparison to a rmp controlled °Varioň diaphragm pump operating in the °Turbo modeň. Therefore this type of diaphragm pump is an excellent choice as a backing pump for turbomolecular pumps.


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partial pressure (mbar)

10-5

backing pressure 1 mbar

10-6

10-3 mbar

1 mbar m = 18 water

10

-7

10-8

m = 28 nitrogen m = 2 hydrogen m = 32 oxygen

10-9

0

10

20 time (min)

30

40

50

Fig. 8: Time profile of residual gas components in a 500 l vacuum chamber. Between 20 and 30 minutes, the diaphragm backing pump (backing pressure: 1 mbar) was replaced by an oil-sealed rotary vane pump (backing pressure: 10-3 mbar).

Interpretation The partial pressures of all observed mass lines in a good high vacuum system, except for atomic and molecular hydrogen, continuously go down with pump time and level at a constant value. In this case the partial pressures are mainly determined by the outgassing rate of the vacuum chamber and the pumping speed of the turbomolecular pump. Further reduction in backing pressure beyond 0,2 mbar does not bring any improvement. Only in the case of hydrogen, where the compression ratio of the turbomolecular pump is relatively small, the partial pressure in the high vacuum is significantly affected by the backing pressure. Depending on the variation of the hydrogen compression ratio of the turbomolecular pump with the backing pressure in the 10 to 0,2 mbar range, the hydrogen partial pressure drops significantly with the backing pressure. Particularly there is a drastic improvement when going from 2 bar to 0,2 bar. Changing to a backing pump with even lower ultimate pressure, i.e. rotary vane or Roots-pump, has no further effect on the measured partial pressures.

Summary The combination of diaphragm pumps with wide-range turbomolecular pumps constitutes an outstanding high vacuum pumping system, which also shows advantages with respect to price and ease of servicing compared to the conventional combination of rotary vane and turbomolecular pumps. In general, the ultimate pressure in the high vacuum chamber is basically limited by the ratio outgassing rate / pumping speed and not by compression ratio / backing pressure. For hydrogen, where the compression ratio is relatively small, the hydrogen partial pressure can be improved by choosing a diaphragm pump with lowest attainable ultimate vacuum.


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Nekolik zajı mavostıze sortimentu firmy LEYBOLD

Firma LEYBOLD je tradic nı m dodavatelem vyrobku vakuová techniky v sirokám sortimentu, vyvev, mericı ch prı stroju, hledac u netesnostı , fitinku a ventilu. Protoz e nenımoz ná ani –c elná zabyvat se v kratkám prı spevku tak sirokym spektrem, omezı me se v nasledujı cı m na tri skupiny produktu, která by mohly zaujmout principem, urc enı m nebo cenou. Prvnıje skupina vyvev ECODRY. Asi pred 20 lety zahajili vyrobci odhodlaná taz enıs cı lem zı skat bezolejovy c erpacısystám, ktery by byl parametry plne srovnatelny se stojany pouz ı vajı cı mi jako primarnırotac nıolejovou vyvevu (ROV). V ROV olej krome dalsı ch –kolu maz e troucıse c asti. S tı m se v bezolejovych vyvevach dalo vyporadat dvema cestami : konstrukcıpreciznı ch soustrojıs rotory sloz itych geometrickych tvaru, která mezi sebou udrz ujıpri rotaci minimalnımezeru, ale nejsou v kontaktu nebo technologicky volbou materialu oteruvzdornych a schopnych odvást vznikajı cıteplo. V tuzemci, ktery zı skal bezprostrednıcit pro material hrou s drevenymi kostkami, stavebnicı Merkur, opravami kolobez ky, bicyklu a automobilu, vyvola druha cesta dojem niz sı z ivotnosti, ale to ponekud podcenuje modernımaterialy. Uz itı m hlinı kovych slitin, povlaku polytetrafluoretylenu, fluorkarbonováho kauc uku a nerezi bylo dosaz eno mezi–drz bováho intervalu 2 roky pri prakticky nepretrz itám provozu, samozrejme pri c erpanıneagresivnı ch latek. Firma Leybold dodava vyvevy rady EcoDry M o c erpacı ch rychlostech 15, 20 a 30 a EcoDry L s c erpacırychlostı40 m3/h, která ve trıa c tyrstupnovám usporadanıdosahujı meznı ho tlaku radu Pa, ve dvojstupnovám desı tek Pa. Hmotnostıjsou srovnatelná s odpovı dajı cı mi rotac nı mi olejovymi vyvevami, lze je provozovat poloz ená na bok, aniz by cokoliv vyteklo. Co je vsak mimoradne prı znivá, je porovnanıcen. Vyjdeme-li z cen odpovı dajı cı ch dvoustupnovych ROV, je cena vyvev rady EcoDry M jen o nekolik desı tek % vyssı , zatı mco u vyvev s komplikovanymi rotory, jaká napr. v sortimentu Leybold reprezentuje nynıdvouproudá sroubová c erpadlo DuraDry, je vesmes znatelne vyssı . Vzhledem k dostupnosti turbomolekularnı ch vyvev s molekularnı m stupnem je to tedy ekonomicky prijatelna cesta k bezolejovámu c erpacı mu systámu. Druhou skupinou vyrobku jsou kapacitnıtransmitery CTR 90 / 91. Uz ivatelá vakuová techniky si uz na kapacitnımerky zvykli a moz nost odlisit signal vyvolany nepatrnymi silami zredenáho plynu od tepelnych dilatacıa dalsı ch sumu jim pripada samozrejma. Definitivnı m resenı m tohoto problámu je termostatizace merky na nekolik desı tek ”C, napr. 45 ”C, jako je tomu u rady termostatizovanych transmiteru LEYBOLD CTR 91. Za toto resenıje ovsem nutno zaplatit jistou cenu, a to nejen financ nı . Aby bylo moz no vyuz ı t plne zı skaná presnosti a citlivosti, je nutno nechat jakoukoli termostatizovanou merku nejprve spolehlive prohrat na urc enou teplotu, coz vyz aduje nekolik hodin. Termostatizacına zvysená teplote vytvarı me cı tankovou ukazku fyzikalnı ho systámu, kde se uplatnıtepelna transpirace plynu, kterou je nutno korigovat. S vlivem teploty na presnost mericı ho prı stroje se utkaval c lovek od nejzazsı ch poc atku merenıa je zajı mavá sledovat mnohdy genialne prostá myslenky z dob, kdy jeste nebylo


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moz no napechovat merak mikroelektronikou, aby se s tı m nejak vyporadala. U rady starych kyvadlovych hodin je pozoruhodna konstrukce kyvadla. C oc ková zavaz ınenıpripevneno prı mo na konci hlavnıtyc e, ale na kratká tyc ce, smerujı cıod konce hlavnıtyc e zpet k hodinam. Ma-li zpetna tyc inka tolikrat vetsıtepelnou roztaz nost, kolikrat je kratsı , kompenzujıse pri zmenach teploty dilatace tyc ıa hodiny jsou presnejsınez s jednoduchym kyvadlem. Myslenky kompenzace vyuz ı va firma Leybold u rady teplotne kompenzovanych transmiteru LEYBOLD CTR 90. Dokonala kompenzace je samozrejme obtı z nejsınez termostatizace, proto rada kompenzovanych transmiteru konc ınejcitlivejsımerkou s rozsahem 1 torr, zatı mco rada termostatizovanych transmiteru 0,1 torr, presto v mnoha aplikacı ch je vhodná jejich vyhody uvaz it. Poslednıskupinou zajı mavych produktu firmy LEYBOLD, o která se chceme zmı nit, je nove uvadena moz nost propojenımenic u turbomolekularnı ch vyvev s poc ı tac em pres rozsı rena standardnırozhranı . To umoz nuje napr. poc ı tac em nebo malym kontrolerem palm obsluhovat elektroniku menic e a naopak sledovat prubeh c erpanıa zatı z enıvyvev podle velic in na menic i. U vyvev s mechanickymi loz isky lze pomocıspecialnı ho software rı dit otac ky vyvevy v sirokám rozsahu, podle typu az 1:2. Uvaz ı me-li, z e turbomolekularnıvyveva je dnes elektronicky stabilizovany setrvac nı k, nabı zıse tı m zajı mava moz nost regulace c erpacırychlosti, coz muz e nabı dnout nova resenınekterych problámu. Zastoupenıfirmy Leybold pro C R a SR najdete na adrese : AQUA Chemie spol. s r. o. C eskomoravska 21 190 00 Praha 9 tel. +420 +2 6603 8939, - 8940 fax +420 +2 6603 8941 e-mail: [email protected] Servis vyrobku firmy Leybold pak na adrese : Servis FINN Š LEY s. r. o. Sima c kova 2 628 00 Brno tel. +420 +5 4421 1339 fax+tel. +420 +5 4421 3230 e-mail: [email protected]


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Novinky roku 2001 firmy Pfeiffer Vacuum Dr. Ing. R. Salomonovic , Doc. Ing. Z. Hulek, CSc. Na letosnıvystave PRAGOVAC prezentovala firma Pfeiffer Vacuum nekolik novinek, která se objevujıv sortimentu firmy v letosnı m roce. Nová produkty spadajıdo nekolika ruznych oboru a doplnujıjejich jiz zavedená bohatá spektrum komponent a technologiı . Pro prumyslová aplikace v oboru hrubáho vakua byla uvedena kompletnırada c erpacı ch stojanu PackageLine. Jde o kombinaci jednostupnovych rotac nı ch vyvev a Rootsovych vyvev s celkovou c erpacırychlostıod 235 do 5500 m3 za hodinu. Rotac nıvyvevy majı integrovany vystupnıfiltr olejovych par s recyklacıa bezpec nostnıventil. Pouz itıtechto systámu se nabı zıv metalurgii, balı cı m prumyslu, jako predvakuová stojany nebo pro c erpanı vakuovych vpustı . V oblasti suchych vyvev prichazı firma Pfeiffer Vacuum s novym konceptem OnTool DryPump. Jde o novy prı stup v resenıumı stenıvyvev prı mo u vyrobnı ho zarı zenıoproti klasickámu pojetıs c erpacı mi stojany stojı cı mi mimo vlastnıprovoznı zarı zenıa pripojenymi dlouhym prı vodnı m potrubı m. Novym poz adavkum odpovı dajıparametry: malá rozmery pri relativne vysoká c erpacırychlosti, nı zka hluc nost a vibrace, nı zká naklady na pripojovacı vakuová potrubı , promenná otac ky a tı m i ovladatelna promenna c erpacırychlost. Samozrejmostıje bezolejová provedenı , bez dynamickych tesnenıa tedy s velmi nı zkymi provoznı mi a –drz bovymi naklady. Segment turbomolekularnı ch vyvev je doplnen predevsı m novou “ vlajkovou lodı ° TPH 2101 s integrovanou rı dı cıjednotkou. Tato vyveva s velmi prı znivym pomerem vykon/cena je urc ena vzhledem ke svá vysoká c erpacırychlosti pro aplikace v polovodic ovám prumyslu, ve vyzkumu a vyvoji a obecne pro vysokovakuová procesy.

Sortiment turbomolekularnı ch vyvev je rozsı ren i na opac ná strane skaly. Malá modely TPD 011, TMH(U) 071 a TMH(U) 261 s napajenı m 24 V jsou zamereny predevsı m na OEM zakaznı ky.


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Na poli malych c erpacı ch stojanu s turbomolekularnı mi vyvevami je nynıv nabı dce Pfeiffer Vacuum stojan TSH(U) 071 E (Economy), ktery zaujme predevsı m akademicky sektor trhu a OEM zakaznı ky. Jeho primarnıdevizou je, jak jiz nazev napovı da, cena.

Poslednınovinkou predstavenou na prezentaci Pfeiffer Vacuum jsou kapacitnıvakuová senzory rady CCR. Jde merky s keramickou membranou a vysokou mechanickou a teplotnıstabilitou. Prednostıtáto rady je interface plne kompatibilnıs vetsinou dnes pouz ı vanych zarı zenı v polovodic ovám prumyslu.

Na zaver prezentace byly oznameny taká zmeny telefonnı ho cı sla Praz ská poboc ky Pfeiffer Vacuum a zmenu nazvu servisnı organizace Servis Balzers na Vakuum Servis. Pro nase c tenare a zakaznı ky Pfeiffer Vacuum uvadı me tyto zmeny i zde:

Pfeiffer Vacuum Poboc ka Praha pro C R a SR Zvonarska 885 156 00 Praha 5 Tel. +420 2 57 92 38 88 fax +420 2 579 230 14 E-mail: [email protected] [email protected] [email protected] URL http://www.pfeiffer-vacuum.at

Jir ıKuba n Š VAKUUM SERVIS Ul. Hasic ska 2643 756 61 Roz nov p. Radhostem tel. 0651 602314 fax 0651 603166 E-mail: [email protected] URl http://www.vakuum-servis.cz


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Pr edstavujeme firmy Pro zlepsenı informovanosti i tech c lenu C VS, kterı se nez–c astnili seminare PRAGOVAC, se vybor C VS rozhodl zverejnovat ve Zpravodaji profily firem, jejichz aktivity se tykajıvakuová techniky a technologie a která o to projevızajem. V tomto c ı sle prinası me prvnıdoslá prı spevky.

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Benefits: Increased throughput by +20% to +100% Reduces pump-down time by -25% to -75% Better quality of produced layers Technical data: Fast cool down and warm up Cooling capacity up to 3600 W Temperatures down to -150”C


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E-beam evaporators: Developed and manufactured in Germany, Ferrotec electron beam products have a reputation worldwide for being at the leading edge of electron beam technology. Ferrotec’s global organization provides local customer service and comprehensive technical support. Ferrotec offers single and multi-hearth evaporators, power supplies and controllers for a wide range of applications including semiconductor, thin film and optical coating. A Ferrofluidicš seal takes advantage of the response of a magnetic fluid to an applied magnetic field. The basic seal components include ferrofluid, a permanent magnet, two pole pieces and a magnetically permeable shaft. The magnetic circuit, completed by the stationary pole pieces and the rotating shaft, concentrates magnetic flux in the radial gap under each pole piece. When fluid is applied to this gap it assumes the shape of a liquid O-ring and produces a hermetic seal. Ferrofluidic vacuum rotary feedthroughs utilize multiple rings of ferrofluid contained in stages formed by grooves machined into either the shaft or pole pieces. Typically a single stage can sustain a pressure differential of 200 mbar. The pressure capacity of the entire feedthrough is approximately equal to the sum of the pressure capacities of the individual stages.


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Telefon: +420 5 47220936, 47220760 Na zev firmy: TESCAN, s.r.o. Fax: +420 5 47220936, 47220016 Adresa: Libusina tr. 21 http: www.tescan.cz 623 00 BRNO C eska republika Kontaktnıosoba: Jaroslav Klı ma, jednatel, [email protected] Tescan,s.r.o. je c eska firma vyrabejı cıvedecká prı stroje a laboratornızarı zenı . Nosnymi vyrobky jsou rastrovacıelektronová mikroskopy, jejich moduly a prı slusenstvı . Rastrovacıelektronová mikroskopy VEGA, která firma v souc asnosti vyrabıse vyznac ujıvynikajı cı mi elektronove-optickymi vlastnostmi, jsou plne automatizovaná a rı zená poc ı tac em. Poskytujıuz ivateli vysoky stupen komfortu, zahrnujı cıautomatická nastavovanı mikroskopu, jakoz i systám pro zpracovanı , vyhodnocovanıa archivaci snı mku. Jsou prı kladem dokonalá symbiozy presná strojnıvyroby, modernıelektroniky a sofistikovanáho programováho vybavenı . Projekt VEGA zı skal zvlastnıocenenıInz enyrská akademie C eská republiky za mimoradná technická dı lo. Rastrovacıelektronovy mikroskop VEGA byl taká na Mezinarodnı m strojı renskám veletrhu 2001 ocenen zlatou medailı .

Za kladnıtechnicků parametry mikroskopu VEGA Rozlisenı : 3,5 nm Zvetsenı : 15x az 500 000x Urychlovacınapetı : 500 V az 30 kV


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Moznosti kalibracımer idel vakua v C R V poslednı ch letech smeruje nemaly objem zahranic nı ch investic do podniku uz ı vajı cı ch vakuovou techniku a s vakuovou technikou ma co do c inenıi stale vı ce domacı ch firem. Protoz e jde vetsinou o vyroby, kde se certifikace podle norem rady ISO 9000 stava nezbytnostı , je jednı m z predpokladu tohoto rozvoje dostupnost kalibrace meridel. S uspokojenı m je nutno konstatovat, z e od nulováho bodu, ktery nastal v momentu rozdelenı federace, byl na tomto poli vykonan velky kus prace, takz e v C R je dostupna jiz velka c ast metrologickych sluz eb na –rovni srovnatelná s renomovanym zahranic ı m. Prinası me kontakty a zakladnıinformaci o oddelenıprimarnımetrologie vakua, kam se lze s potrebou techto sluz eb obracet. C MI - OBLASTNI INSPEKTORA T BRNO 613 - Oddelenıprima rnımetrologie tlaku Okruz nı31, 638 00 BRNO http://www.cmi.cz tel: (05) 4522 27 27 fax: (05) 4522 21 83 Mgr. JirıTesar Ing. Zdenek Krajı c ek Ing. Frantisek Stanek Mgr. Dominik Praz ak

[email protected] [email protected] [email protected] [email protected]

Novů sluzby str ediska: V nedavná dobe oddelenırozsı rilo svá sluz by v oblasti poskytovanıkalibracıv oboru vakua do rozsahu 10-7 Pa dı ky novym ionizac nı m vakuometrum (navaznost na PTB). Zcela nove byla zavedena kalibrace etalonu háliová netesnosti v rozsahu 10-9 az 10-3 Pa.m3.s-1 (navaznost na PTB). Dale bylo dosaz eno snı z enınejistot u etalonaz e maláho hmotnostnı ho prutoku plynu dı ky porovnanıs NRML (Japonsko), Metas (Svycarsko) a PTB (Nemecko).

Na vaznost Souc asná navazanıjednotky tlaku ve vakuu se odvı jıod pı stováho etalonu tlaku PG 7601, jehoz tlakova merka bala geometricky vyhodnocena a nasledne porovnana s vynikajı cı mi vysledky napr. s etalony PTB v Nemecku c i NMI v Holandsku. V letosnı m roce byl tento etalon vyhlasen statnı m etalonem C R.

Nejlepsıschopnosti kalibrace a mer enı : Nejlepsıschopnosti kalibrace a merenıjsou udany jako rozsı rena kombinovana nejistota pro –roven pravdepodobnosti pokrytı95 %


mer ena velic ina nebo pr ı stroj Absolutnıtlak

rozsah kalibrace 10-5 az 10-7 Pa

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Nejlepsıschopnosti kalibrace a mer enı (8 az 12)% dle rozsahu (1,5 az 2,5)% dle rozsahu (0,1 az 0,2)% dle rozsahu 0,5 Pa + 12 ppm

identifikace metody, pozna mky Ionizac nıvakuometry

Absolutnıtlak

100 az 10-4 Pa

Absolutnıtlak

103 az 100 Pa

Absolutnıtlak

5 kPa az 7 MPa

Pretlak - plyn

1 Pa az 3,2 kPa

0,02 Pa + 80 ppm

Pretlak - plyn

3,2 kPa az 5 kPa

20 ppm

DHI PG 7102

Pretlak - plyn

5 kPa az 10 MPa

0,2 Pa + 10 ppm

DHI PG 7601

Podtlak - plyn

1 Pa az 3,2 kPa

0,02 Pa + 80 ppm

FRS 4

Podtlak - plyn

5 kPa az 100 kPa

1 Pa + 12 ppm

DHI PG 7601

Pretlak - kapalina

10 kPa az 500 MPa

DHI PG 7302

Pretlak - kapalina

500 MPa az 1 GPa

(23 az 120) ppm dle rozsahu 0,2 %

Diferenc nıtlak

0,1 kPa az 1 MPa

1 Pa + 50 ppm

1 az 30 000 n cm3/min

(0,15 az 0,3) % dle rozsahu (3 - 8)% dle rozsahu

Maly hmotnostnı prutok Heliová netesnosti Hustota plynu

10-9 - 10-3 Pa m3 s-1 0,5 az 100 kg/m3

(0,1 az 0,25) % dle rozsahu

Viskosnıvakuometr Staticka expanze DHI PG 7601 FRS 4

AMSLER 10 000 Divider Molbloc/Molbox Prisma Primarnıaparatura

V oboru vakua jsou v souc asnů dobe poskytova ny kalibrace: •

Piraniho vakuometru

•

Penningovych vakuometru

•

kapacitnı ch vakuometru

•

kapalinovych vakuometru

•

deformac nı ch vakuometru

•

ionizac nı ch vakuometru

•

termoc lankovych vakuometru

•

piezoelektrickych vakuometru

•

rezonanc nı ch vakuometru

Bliz sıinformace vc etne aktualnı ch cen kalibracıjsou uvedeny na internetovych strankach C MI na adrese www.cmi.cz .


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C SN tykajı cıse vakuovů techniky vyber proveden podle URL http://www.csni.cz/ORDERS/vyber.asp. C SN 01 1326

Velic iny a jednotky ve vakuová technice

C SN 01 3621

Poz adavky na kreslenıvakuovych schámat

C SN 01 3622

Znac ky pro schámata. Stavebnıprvky vakuovych zarı zenı

C SN 10 7001

Nazvoslovıve vakuová technice

C SN 10 7002

Vakuova zarı zenı . Klasifikace

C SN 10 7005

Znac ky pro kreslenıschámat vakuovych zarı zenı

C SN 10 7015

Vakuová zarı zenı . Jmenovitá svetlosti Js

C SN 10 7220

Vakuová prı rubová spoje. Druhy a zakladnırozmery

C SN 10 7221

Vakuova zarı zenı . Prı ruby pro vakuová spoje

C SN 10 7222

Vakuova zarı zenı . Prı ruby otoc ná pro vakuová spoje

C SN 10 7224

Distanc nıkrouz ky pro vakuová spoje

C SN 10 7226

Sverky pro vakuová spoje s prı rubovymi nakruz ky

C SN 10 7228 C SN 10 7229

Vakuová zarı zenı . Prı rubová spoje pro ultravakuová systámy. Konstrukce, rozmery a technická poz adavky . Vakuová zarı zenı . Spoje ultravakuovych potrubı . Montaz nırozmery

C SN 10 7233

Vakuová zarı zenı . Ventily vakuová prı má a rohová. Montaz nırozmery

C SN 10 7234

Vakuová zarı zenı . Spoje vakuovych potrubı . Montaz nırozmery

C SN 10 7235

Vakuova zarı zenı . Upı nacıtrmenová rychlospoje pro obory hrubáho, jemnáho a vysokáho vakua , Vakuova zarı zenı . Pryz ová tesnicıkrouz ky

C SN 10 7255 C SN 25 7072 C SN 25 7207 C SN 25 7214 C SN 25 7215 C SN 25 7216 C SN 35 8571

Tlakomery. Pruz ná tlakomerná prvky manometrov, manovakuometrov a vakuometrov. Vseobecná technická poz iadavky a metody sk–sok , Manometre, manovakuometre a vakuometre indikac ná. Metody sk–sania pri –radnom overovanı, Etalonová deformac ná manometre a vakuometre. Technická poz iadavky Metrologia. Manometre, vakuometre deformac ná. Sekundarne etalony. Metody sk–sania pre –radná overovanie , Kontaktná manometre a vakuometre. Metody sk–sania pre –radná overovanie Obrazovky. Metody stanovenıc initele vakua

C SN EN ISO 1741 Dextroza. Stanovenıztraty hmotnosti susenı m. Metoda vakuová susarny (ISO 1741:1980) C SN EN 1251-1 Kryogenická nadoby - Prepravnıvakuove izolovaná nadoby s objemem do 1000 litru vc etne - C ast 1: Zakladnıpoz adavky C SN EN 1251-2 Kryogenická nadoby - Prepravnıvakuove izolovaná nadoby s objemem do 1000 litru vc etne - C ast 2: Konstrukce, vyroba, kontrola a zkousenı


C SN EN 1251-3 C SN 70 0577 C SN 70 2104 C SN EN ISO 10079-3 C SN EN 12546-1

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Kryogenická nadoby - Prepravnıvakuove izolovaná nadoby s objemem do 1000 litru vc etne - C ast 3: Provoznıpoz adavky Sklo. Zkousenınetesnosti sklenenych vakuovych zabrusu Skla pre vakuov– techniku. Banky na svetelná zdroje. Spoloc ná ustanovenia Zdravotnicka odsavacızarı zenı- C ast 3: Odsavacızarı zenıpohanena vakuovym nebo tlakovym zdrojem Materialy a predmety pro styk s potravinami - Tepelne izolac nınadoby pro uz itıv domacnosti - C ast 1: Specifikace pro vakuová nadobı , tepelne izolac nılahve a konvice ,

V prvnı m letosnı m cı sle Zpravodaje C VS vyvolal zaslouz eny ohlas prvnıdı l vzpomı nek p. prof. Libora Patáho na vyvoj vakuová techniky u nas. Dnes tedy prinası me dı l druhy a prejeme autorovi, aby se mohl tesit dobrámu zdravıa prinást nam jeste nejednu vzpomı nku na zac atky oboru, ve kterám se dnes angaz ujeme.

Vakuova technika v pova lec nych letech II. Vzpomı na Libor Paty V poslednıvzpomı nce jsme zmı nili zrod nekterych institucı„ –stavu, laboratorıa kateder, která mely ve svych zamerech do vetsıc i mensımı ry rozvı jenıvakuová techniky a v dalsı ch letech tyto zamery i naplnovaly. Ze zavodu “ Tesla Elektronik° se vyvinul Vyzkumny –stav pro vakuovou elektrotechniku „ VUVET. (Urc itou dobu nesl nazev rozsı reny o “ ť a technologii souc astek° - VUVETS.) Dostal v pozdejsıdobe k dispozici i areal zamec ku a prilehlych provozoven na Jeneralce. Jeden ze sektoru tohoto –stavu se zabyval prevaz ne vakuovou technikou a pracovaly v nem „ jak se pozdeji ukazalo celoz ivotne „ taková osobnosti, jako byli bratri Hixová a J. Neumann. Zvlastnıvyznam pro vakuovou techniku mela brnenska Laborator elektronová optiky vedena Ing. Zdenkem Burı valem. Konstrukci vakuová c asti stolnı ho elektronováho mikroskopu provedl Ing. Ladislav Zobac , ktery mel tehdy jiz znac ná zkusenosti v oboru vakuovych aparatur. Pri nemalych –kolech, kladenych na nej jako na konstruktára, nalezl c as na to, aby sepsal prvnıc eskou prı ruc ku “ Zaklady vakuová techniky°, jez byla pak po dlouha láta oporou techniku a posluchac u pri studiu. K prave zmı nenámu pracovisti akademie je nutno pripojit i druhá „ Ustav fyzikalnı chemie v Praze (tehdy v Machove ulici), vedeny prof. Rudolfem Brdic kou. Jedna ze skupin tohoto –stavu se venovala konstrukci prvnı ho naseho hmotováho (dnes “ hmotnostnı ho°) spektrometru. Pri táto praci si konstruktári osvojili a rozvinuli modernıvakuovou metodiku. Snad stojıza pripomenutı , z e jak “ Stolnıelektronovy mikroskop°, tak “ Hmotovy spektrometr° byl tehdy ocenen vyznamnymi cenami a tato ocenenıimplicitne potvrzovala vyznam vakuová techniky.


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Vzajemny styk mezi odbornı ky z jednotlivych pracovis vakuová techniky byl v padesatych letech jen sporadicky. V jinych oborech tomu bylo ostatne nejinak. Prı c in toho bylo povı cero: Tehdejsırez im predepisoval ruzná stupne utajenıa pracovnı ci se obavali o svych pracovnı ch problámech mimo pracoviste hovorit, aby to nebylo kvalifikovano jako vyzrazenıvyrobnı ho tajemstvı . Dale prevaz na vetsina pracovnı ku byli mladızac atec nı ci, kterı nebyli vedeni zkusenejsı mi, starsı mi predstavenymi a neznali cenu vzajemná komunikace mezi kolegy. Z dnesnı ho pohledu je proto nutno ocenit myslenku, ktera se zrodila na matematicko-fyzikalnıfakulte Karlovy univerzity, katedre vysoká frekvence a vakuová techniky, zrı dit pravidelny seminar vysoká frekvence a vakuová techniky, na nejz byli zvani k prednesenıinformace o vlastnıpraci odbornı ci z ruznych pracovis . Tento seminar postupne lamal bariery mezi pracovisti a umoz noval diskusi o problámech vakuová techniky a otevı ral i cestu k tehdy vzacnym zpravam o stavu oboru v zahranic ı . C as od c asu na seminari prednaseli i navstevy „ hostá - nejc asteji akademie „ ze zahranic ı . Seminar byl po dlouha láta hojne navstevovan a bylo by jiste pro zajemce o historii oboru zajı mavá se blı z e seznamit s obsahem seminaru. V ramci techto vzpomı nek to prirozene nenımoz ná, lze vsak odkazat na “ Pametnı knihu KEVF°, v nı z jsou tyto informace systematicky a presne zaznamenany. Alpertovy prace z poloviny padesatych let vzbudily i u nas pozornost, ktera vy–stila ve snahu konstruovat ultravakuovou aparaturu. Problámu zde bylo mnoho: vhodny ionizac nı vakuometr, ultravakuova vyveva, spolehlivy ventil pracujı cıdokonale tesne a bez vakuováho mazu a samozrejme odplynitelny pri teplotach pres 400 ”C a konec ne materialová problámy jako vhodná tvrdá sklo (sklo Pyrex u nas bylo tehdy nedostupná a pouz ı vaná molybdenová sklo nemuselo byt dostatec ne neprostupná pro nekterá plyny okolnıatmosfáry. Na katedre vysoká frekvence a vakuová techniky byl v tá dobe konstruovan ionizac nıvakuometr pro potreby praktika pro posluchac e c tvrtáho roc nı ku. Tento vakuometr mel dobre odplynitelnou mrı z ku z molybdenováho dratu a v jeho ose byl vlaknovy kolektor tak, jak popsali Bayard a Alpert. Chybel vsak celokovovy ventil s izolujı cıkovovou membranou a na jeho konstrukci bez svarec ky s elektronovym svazkem nebylo ani pomyslenı . Autor techto vzpomı nek prisel s myslenkou konstruovat mı sto ventilu uzaver na principu rtu ováho uzaveru se sklenenou trubicı , v nemz by bylo mı sto rtuti pouz ito india, kovu tajı cı ho pri zahratıolejovou laznı . Konstrukce tzv. indiováho ventilu se osvedc ila a v roce 1957 bylo na sklenená aparature s tı mto ventilem a ionizac nı m vakuometrem dosaz eno ultravakua. To bylo silnym impulzem pro praci s ultravakuem i na ostatnı ch pracovistı ch, zejmána ve Vyzkumnám –stavu pro vakuovou elektrotechniku. Koncem padesatych let prisla doc. Ludmila Eckertova z KEVF (katedra vysoká frekvence a vakuová techniky zmenila svuj nazev na katedru elektroniky a vakuová fyziky) s navrhem usporadat celostatnıkonferenci o elektronice a vakuová fyzice. Navrh se opı ral o zkusenosti se seminari, která prokazaly, z e na nasich pracovistı ch existuje dostatek vedeckych a vyvojovych vysledku, která by snadno naplnily i vı cedennıkonferenci. Byl sestaven organizac nıvybor za predsednictvıdoc. Eckertová, ktery sestavil koncepci konference a postaral se o nezbytná hmotná zajistenı . Spoluporadateli byla Jednota c s. matematiku a fyziku a Vyzkumny –stav pro vakuovou elektrotechniku. Odezva na ohlasenıkonference byla nad vsechna oc ekavanı„ prihlasilo se pres dve ste –c astnı ku a ohlaseno bylo 80 prednasek. Konference probehla v roce 1960 v Narodnı m klubu Na Prı kope. Konferenci zahajil ministr skolstvıa –vodnıprednasky prednesli Ing. J. Vana o vyvoji nasıelektroniky, L Pekarek o ionizac nı ch jevech v plynech a L. Paty o souc asnám stavu fyziky nı zkych tlaku. Jedna ze sesti sekcıkonference byla venovana vakuová fyzice a technice. Konference znamenala velky –spech a byla vyuz ita i k prijetırezoluce, v nı z byly z adany statnıorgany o podporu vedy,


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vyzkumu a vyvoje v elektronice a vakuová technice. Rezoluce doporuc ila po dvou letech usporadat konferenci dalsı . Z konference byl vydan sbornı k jako dvojc ı slo C s. c asopisu pro fyziku A. Zasadnı m vysledkem konference bylo to, z e se na nıosobne poznali odbornı ci z ruznych pracovis , vymenili si zkusenosti a v mnoha prı padech navazali spolupraci.

Kalrez Pavel Drasar, SciTech s.r.o., Praha Synonyma FFKM, TSE, alternativa Zalakš . Kalrez je razen mezi fluoropolymery TS, termosety, elastomery TS a nekdy i pryz e. Je to mimoradny perfluoroelastomerovy kompozitnımaterial s vysokou chemickou odolnostıa velmi dobrymi mechanickymi vlastnostmi. Jde o intelektualnıvlastnictvıa produkt spolec nosti DuPont Dow. Spojuje ve svych vlastnostech kvality fluoroelastomeru Vitonu s chemickou odolnostı fluoropolymeru Teflonu. Hodıse vsude tam, kde je vyz adovana spolehliva a dlouhodoba funkce a kde na prı slusny prvek pusobıagresivnıchemikalie a teplo. Je prokazana odolnost vuc i vı ce nez 1600 chemikaliı m a za teplot az do 316 ”C (kratkodobe i vyssı ). V celám rozsahu pouz itısi zachovava svoje elastická, chemická vlastnosti a tepelnou odolnost. Zvlaste je vhodny pro pouz itıv c istych prostredı ch citlivych na jakoukoliv kontaminaci. Kalrez je odolny i vuc i botnanı , tak naprı klad sestimesı c nıpusobenısmesi methylethylketonu, toluenu a dichlormethanu zanechala Kalrezová O-krouz ky “ nedotc ená° zatı mco klasická, pryz ová byly silne nabotnalá. Nejbez nejsıkompozit je StandardnıKalrez 4079 pro obecná pouz itıse nedoporuc uje se napr. u horká vodnıpary, horkych alifatickych aminu, ethylenoxidu a proylenoxidu. Pro paru a aminy se naopak hodıKalrez 1050LF. Vodnı pare vzdoruje dobre taká sazemi plneny Kalrez 1018, nadruhá strane nevhodny pro pouz itıu organickych i anorganickych kyselin. Nejplastic tejsıKalrez 1058, plastifikovany perfluorovanym olejem je nejmekc ız celá rodiny Kalrezu, je podobne odolny jako Kalrez 1058 s tı m, z e pri vyrobe se mohou menit jeho rozmery, pouz ı va se na tesnenınaprı klad u vysokotlaká chromatografie. Kalrezy trı dy Ultrapure jsou baleny v dvojitych obalech v prostredıtrı dy (Class) 100 pro pouz itıv extráme c istám prostredı . Bı ly Kalrez 2037 se pouz ı va v oxidac nı m a kyselám prostredı . Tesnı cıa elastická vlastnosti, testovaná podle normy ISO 334 ukazaly jeho naprostou prednost pred jinymi elastomery. Dokonce si zachovaly i svuj puvodnıtvar pri dlouhotrvajı cı m pouz itı . Kalrez je velmi odolny proti ohni. Jeho hustota je obecne okolo 2, je pretrz en az pri 150 % elongaci. Obecne lze shrnout, z e tesnı cıa elastická vlastnosti tohoto materialu lze tez ko popsat uvedenı m nekolika prı kladu kompozic. Je predurc en vsude tam, kde nastavajıpotı ze s klasickymi tesnı cı mi materialy. LITERATURA http://www.dupont-dow.com/products/kalrez, http://www.matweb.com, http://www.stateseal.com/kalrez.htm, 18. 4. 2001.


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VaQum 1.International Trade Fair for Vacuum Technology and Vacuum Applications in Magdeburg 17 - 19 June 2002 Realization of an idea: meeting point for the trade Vacuum technology and its applications are important for all modern fields of hightechnology. These necessary base for all fields of industrial progress has never before had its own trade fair as a platform for information, and until today, the expert had to visit several trade fairs to get a general idea of the field. The vaQum offers the opportunity to become familiar with modern trends of development in the field of vacuum physics, vacuum technology, and its applications to producers, service providers and users. The international trade fair for vacuum technology and vacuum applications will be accompanied by several workshops and colloquiums on trends in the field. Hosting this trade fair, the Magdeburger Messebetriebesgesellschaft mbH & Co. KG is working hand in hand with important partners of the industry, for example the VDMA (German Engineering Federation) and the VDI (Association of German Engineers). Potential exhibitors of the vaQum are companies, which develop, produce or sell vacuum components or mechanical engineering for different applications, e.g. industrial plants, research centers and sales companies for vacuum technology. The target audience for the vaQum is European, American, and Japanese manufactures who sell their products in this market. The key exhibitions issues are: vacuum components such as pumps, total and partial pressure gauges, fittings and appliances for analysis, vacuum plants for the physical construction of apparatus, space and nuclear research; beam epitaxy technology, semiconductor technology, high integrated micro electronics and micromechanical components; solar panels and solar cells; pharmaceutical, food- and luxury food, wood and chemical industries, production of ceramics; mechanical and electrical engineering and electronics; finishing of material; agriculture and facility management; recycling; metallurgy and metal processing; medicine technology; training, and further education in vacuum physics and vacuum technology. The visitors of the trade fair are sales representatives from different branches, who sell vacuum products, but also include physicists, chemists, and engineers from all branches which deal with vacuum plants or vacuum technologies, or want to use these technologies to modernize their production. The VDI is organizing a Ceremonial Colloquium for the 400th birthday of Otto-vonGuericke, and a workshop "Vacuum Technology in the Chemical and Metallurgical Industry" within the accompanying program. And the European Society for Thin Films is organizing a workshop "In-Line-Vacuum Coating and Plasma Treatment of Flexible Materials".


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Magdeburg celebrates the 400th birthday of Otto-von-Guericke The date for the first trade fair for vacuum technology was a conscious choice. In 2002 are several activities and celebrations in the capital of Saxony-Anhalt on the occasion of the 400th birthday of Otto von Guericke. The former 17th century mayor of Magdeburg and inventor became famous with his experiments on physics and vacuum theory. Numerous events are planned like the spectacular "Experiment of the Magdeburger Hemisphere" or a guided tour in the Millenium Tower, as well as a guided tour through the historical collection in the Lukasklause with guides of the Otto-von-Guericke-Society. These events and the scientific program offer exactly the proper surroundings for the first independent special trade fair for vacuum technology and its applications.


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C eska vakuova spolecnost preje vs em clenu m a ctenaru m hezke vanoce a mnoho ěspýchu v nove m roce 2002.

vybor C VS redakce Zpravodaje

Redakc ne pr ipravili : RNDr. Pavel B. Drasar, CSc., SciTech, spol. s r. o., Nad Sarkou 75, 160 00 Praha 6, tel. (02) 33330789, fax (02) 24311850, e-mail [email protected] Mgr. JirıDrbohlav, KEVF MFF UK Praha, V Holesovickach 2, 180 00 Praha 8 tel. (02) 21912734, fax (02) 6685095, e-mail [email protected] RNDr. Ladislav Peksa, CSc., KEVF MFF UK Praha, V Holesovickach 2, 180 00 Praha 8 tel. (02) 21912302, fax (02) 6685095, e-mail [email protected]

ZPRAVODAJ C VS 10 (3-4), 2001 PRAGOVAC Nekolik zajımavostıze sortimentu firmy LEYBOLD 9

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